Semiconductor

Overview

Experience Optimal Semiconductor Logistics Automation

MX Robotics provides automation solutions that organically connect processes and logistics based on a deep understanding of the semiconductor industry and accumulated technological expertise. We propose systems optimized for the customer's production environment and requirements based on a diverse product range and solution portfolio, and realize high stability and efficiency throughout the entire process from design to construction and stable operation. Through continuous technological advancement and product line expansion, MX Robotics continues to provide a more sophisticated and flexible smart automation environment for the semiconductor industry.

Introduce Hi-Tech Hub

Hi-Tech Hub 전경

(Location: 85 Gajang Industrial Northwest 1-ro, Osan, Gyeonggi-do)

Clean Room

반도체 주요 설비

MX Robotics Hi-Tech Hub serves as a core base for semiconductor logistics, securing unrivaled business competitiveness through the relentless technological innovation of its expert workforce. In particular, the Show Room — a hub of cutting-edge technology — builds customer trust and drives market expansion through continuous demonstrations of advanced equipment. MX Robotics is setting new global standards in semiconductor logistics through proven technological expertise and real-time solution delivery.

Reference

SEMICONDUCTOR

Semiconductor

Equipment

Key Equipment

Storage Systems

Stocker

·An automated system for storing and managing materials to maintain optimal production balance in the process
·Various models/types depending on the carrier

Wafer Stocker

·Equipment that removes wafers from FOUPs for separate storage to minimize footprint when storing 300mm wafers
·Wafer storage zone maintains N2 environment

STB (Side Track Buffer)

·A shelf-type buffer for physically staging wafer boxes (FOUPs), eliminating bottlenecks and reducing transport time
·Normal / N2 Type available

Transport Systems

OHT (Overhead Hoist Transport)

·An automated transport system that runs along ceiling-mounted rails in high-throughput environments such as semiconductor production lines
·Space efficiency / High-speed travel

AMR (Autonomous Mobile Robot)

·An intelligent robot that autonomously navigates to its destination by recognizing its surroundings without manual control or physical guides
·Configured as a Mobile Manipulator combining a Collaborative Robot on top of the AMR

Conveyor

·Equipment that automatically supplies materials to the required process equipment at the optimal time, in conjunction with process and auxiliary equipment
·Configurable in various types

Interface Systems

EBS(Equipment Buffer System)

·A Tool Buffer System installed around process equipment, interfacing with OHT and process equipment to improve the operational efficiency of process equipment
·Normal / N2 Purge Type

MLUD(Manual Load & Unload)

·An interface device installed to allow workers to manually load and unload materials for integration with semiconductor process automation transport systems.

TIO(Tray Auto In / Auto Out)

·An automated system that supplies (In) packaged semiconductor chips in trays and discharges (Out) chips after inspection or processing back into trays.